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▼Standard fabrication processes |
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O. D. Grinding, Orientation Flat,
Wire Sawing, Lap, Heat Treatment, Polishing, and Cleaning.
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Standard specification |
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Rod phase orientation, misorientation, OF, TTV, warp or SORI,
Surface Roughness .
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X ray Photoelectron Spectroscopy(XPS) |
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XPS gives amount of each element remained on the surface, binding status, stoichiometry
of aluminum and oxygen, carbide, fluorides, existence
of carbon and nitride, all of those may affect epitaxial growth.
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Reflection High Energy Electron Diffraction（RHEED) |
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Diffraction pattern shows single crystal quality on the surface/sub-surface. |
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Atomic Force Microscope(AFM) |
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Atomic level flatness, Step and Terrace configuration,
those of which critically affect the expitaxial growth.
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Total Reflection X ray Fluoroscent Analysis(TXRF) |
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Heavy metals residuals on the surface.
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Single Crystal Quality (XRD) |
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Peak shape, FWHM, Reciprocal Lattice |
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